Development of nano-roughness calibration standards

Baršić, Gorana and Mahović, Sanjin and Zorc, Hrvoje (2012) Development of nano-roughness calibration standards. = Development of nano-roughness calibration standards. Measurement Science and Technology, 23 (3). 035009. ISSN 0957-0233. Vrsta rada: ["eprint_fieldopt_article_type_article" not defined]. Kvartili JCR: Q1 (2012). .

Full text not available from this repository.
Official URL:


At the Laboratory for Precise Measurements of Length, currently the Croatian National Laboratory for Length, unique nano-roughness calibration standards were developed, which have been physically implemented in cooperation with the company MikroMasch Trading OU and the Ruer Bokovi Institute. In this paper, a new design for a calibration standard with two measuring surfaces is presented. One of the surfaces is for the reproduction of roughness parameters, while the other is for the traceability of length units below 50 nm. The nominal values of the groove depths on these measuring surfaces are the same. Thus, a link between the measuring surfaces has been ensured, which makes these standards unique. Furthermore, the calibration standards available on the market are generally designed specifically for individual groups of measuring instrumentation, such as interferometric microscopes, stylus instruments, scanning electron microscopes (SEM) or scanning probe microscopes. In this paper, a new design for nano-roughness standards has been proposed for use in the calibration of optical instruments, as well as for stylus instruments, SEM, atomic force microscopes and scanning tunneling microscopes. Therefore, the development of these new nano-roughness calibration standards greatly contributes to the reproducibility of the results of groove depth measurement as well as the 2D and 3D roughness parameters obtained by various measuring methods. © 2012 IOP Publishing Ltd.

Item Type: Article (["eprint_fieldopt_article_type_article" not defined])
Keywords (Croatian): Atomic force microscopes; Calibration standard; Croatians; Groove depth; Interferometric microscope; Measuring method; Nanometrology; Nanoroughness; National laboratory; New design; Precise measurements; Reproducibilities; Roughness parameters; Scanning electron microscopes; Scanning probe microscope; Scanning tunneling microscopes; Stylus instrument; Atomic force microscopy; Calibration; Scanning electron microscopy; Standards
Divisions: 800 Department of Quality > 810 Chair of Precise Measurement and Quality
Indexed in Web of Science: Yes
Indexed in Current Contents: Yes
Quartiles: Q1 (2012)
Date Deposited: 27 Apr 2015 10:57
Last Modified: 12 Sep 2018 11:22

Actions (login required)

View Item View Item