Long term stability of silicon roughness standards

Baršić, Gorana and Mahović, Sanjin and Katić, Marko and Šimunović, Vedran (2014) Long term stability of silicon roughness standards. = Long term stability of silicon roughness standards. In: 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014, 02-06.06.2014., Dubrovnik; Croatia.

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Official URL: https://www.bib.irb.hr/702000


In 1986 the first roughness reference standards made of silicon were produced at the Laboratory for Precise Measurements of Length (LFSB), which is now a part of Croatian Metrology Institute (HMI) designated as HMI/FSB-LPMD. Until then, roughness standards were made either from steel or glass. After 27 years of use we decided to conduct a research of metrological features on two silicon roughness standards, used as primary standards for roughness in Croatia. The analysis relies on the roughness parameters measurement results (Ra, Rz and RSm) from calibration certificates provided by several national metrology institutes. Results of the Birge ratio test showed a good statistical consistency within the declared levels of measurement uncertainties.

Item Type: Conference or Workshop Item (Poster)
Keywords (Croatian): Nanotechnology; Precision engineering; Silicon; Uncertainty analysis; Units of measurement; Long term stability; Measurement uncertainty; Metrological features; National metrology institutes; Precise measurements; Roughness parameters; Roughness standards; Statistical consistencies; Standards
Subjects: TECHNICAL SCIENCE > Mechanical Engineering
Divisions: 800 Department of Quality > 810 Chair of Precise Measurement and Quality
Indexed in Web of Science: No
Indexed in Current Contents: No
Citations SCOPUS: 0 (25.09.2018.)
Date Deposited: 21 May 2015 10:14
Last Modified: 25 Sep 2018 11:46
URI: http://repozitorij.fsb.hr/id/eprint/4306

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