Etalon za nanomjeriteljstvo s višestrukim vrijednostima koraka i brazda

Baršić, Gorana and Runje, Biserka and Šimunović, Vedran (2015) Etalon za nanomjeriteljstvo s višestrukim vrijednostima koraka i brazda. = Nano-calibration standard with multiple pitch and step height values. Tehnički vjesnik – Technical Gazette: Scientific professional Journal of technical faculties of the Josip Juraj Strossmayer University of Osijek., 22 (4). pp. 935-938. ISSN 1330-3651. Vrsta rada: ["eprint_fieldopt_article_type_article" not defined]. Kvartili JCR: Q4 (2015). Točan broj autora: 3.

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Abstract (Croatian)

2011. godine uHrvatskom nacionalnom laboratorijuza duljinu (HMI/FSB-LPMD) razvijeni su etaloni za umjeravanje, a koji su izrađeni u suradnji s tvrtkom MikroMaschTrading OU i Institutom Ruđer Bošković. Specifični dizajn etalona čini ih prikladnim za umjeravanje optičkih mjernih uređaja, uređaja s ticalom, skenirajućih elektronskih mikroskopa, mikroskopa atomskih sila i skenirajućih tunelirajućih mikroskopa. Stoga razvijeni etaloni uvelike pridonose obnovljivosti rezultata mjerenja dubine brazde i 2D i 3D parametara hrapavosti dobivenih različitim mjernim metodama. Nakon niza provedenih mjerenja na novim etalonima, temeljem kojih su stečena nova znanja, u HMI/FSB-LPMD-u osmišljeni su novi etaloni za područje dimenzionalnog nanomjeriteljstva. U ovom radu predstavljen je dizajn novog etalona, koji je još uvijek prikladan za umjeravanje različitih tipova mjernih uređaja, ali ima veće mogućnost mjerenja u smislu mjernih raspona u vertikalnom i lateralnom smjeru.

Abstract

In 2011 Croatian National Laboratory for Length (HMI/FSB-LPMD) developed calibration standards which have been physically implemented in cooperation with the company MikroMasch Trading OU and the Ruđer Bošković Institute. Specific design of standards makes them suitable for calibration of optical instruments, stylus instruments, scanning electron microscopes, atomic force microscopes and scanning tunnelling microscopes. Therefore, the developed calibration standards greatly contribute to the reproducibility of measurement results for groove depth well as the 2D and 3D roughness parameters obtained by various measuring methods. After a number of measurements conducted on developed standards, based on which new knowledge was acquired, HMI/FSB-LPMD designed a new standard for the field of dimensional nanometrology. This paper presents the design of a new standard that is still suitable for calibration of different types of measuring instruments, i.e. methods, but has a larger measurement capability in terms of measuring ranges in vertical and lateral direction.

Item Type:	Article (["eprint_fieldopt_article_type_article" not defined])
Uncontrolled Keywords:	nanomjeriteljstvo; etaloni; obnovljivost
Keywords (Croatian):	nanometrology ; calibration standards ; reproducibility
Subjects:	TECHNICAL SCIENCE > Mechanical Engineering
Divisions:	800 Department of Quality > 810 Chair of Precise Measurement and Quality
Indexed in Web of Science:	Yes
Indexed in Current Contents:	No
Quartiles:	Q4 (2015)
Date Deposited:	05 Jul 2016 11:42
Last Modified:	13 Sep 2018 11:48
URI:	http://repozitorij.fsb.hr/id/eprint/6119

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