Dimensional nanometrology

Ropuš, Ivana and Runje, Biserka and Baršić, Gorana (2013) Dimensional nanometrology. = Dimensional nanometrology. In: International conference MATRIB 2013, 27-29.06.2013., Vela Luka, Hrvatska.

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Official URL: https://www.bib.irb.hr/635636

Abstract

Dimensional nanometrology includes quantitative measurements at the nano level. These include the characterization of surfaces and particles (flatness, roughness, dimensions, angle), and the development and calibration of the devices and standards. The task of dimensional nanometrology is to ensure traceability of measurement results to the international system of units at the nanometer level. To achieve this traceability, it is necessary to possess validated measurement methods, calibrated devices and standards.

Item Type: Conference or Workshop Item (Lecture)
Keywords (Croatian): dimensional nanometrology, nanoparticles, surface roughness, AFM
Subjects: TECHNICAL SCIENCE > Mechanical Engineering
Divisions: 800 Department of Quality > 810 Chair of Precise Measurement and Quality
Indexed in Web of Science: No
Indexed in Current Contents: No
Date Deposited: 05 Jul 2016 13:50
Last Modified: 17 May 2018 12:06
URI: http://repozitorij.fsb.hr/id/eprint/6139

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