Long term stability of silicon roughness standards

Baršić, Gorana and Katić, Marko and Šimunović, Vedran (2017) Long term stability of silicon roughness standards. = Long term stability of silicon roughness standards. Precision engineering, 48. pp. 352-356. ISSN 0141-6359. Vrsta rada: ["eprint_fieldopt_article_type_article" not defined]. Kvartili JCR: Q1 (2015). Točan broj autora: 3.

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In 1986 the roughness reference standards made of silicon were produced at the Laboratory for Precise Measurements of Length (LFSB), which is now a part of Croatian Metrology Institute (HMI) designated as HMI/FSB-LPMD. At that time, roughness standards were commonly made either from steel or glass. After 3 decades of use it was decided to conduct a research of metrological features on two silicon roughness standards which were continuously used as primary standards for roughness in Croatia. The analysis is based on measurement results of roughness parameters (Ra, Rz and RSm) from calibration certificates provided by several national metrology institutes. Statistical consistency is checked with Birge ratio test, and En values are calculated in order to check if significant change of roughness parameters over the years can be determined.

Item Type: Article (["eprint_fieldopt_article_type_article" not defined])
Keywords (Croatian): silicon roughness standards; long term stability
Subjects: TECHNICAL SCIENCE > Mechanical Engineering
Divisions: 800 Department of Quality > 810 Chair of Precise Measurement and Quality
Indexed in Web of Science: Yes
Indexed in Current Contents: Yes
Citations JCR: 0 (20.09.2018.)
Quartiles: Q1 (2015)
Date Deposited: 30 Mar 2017 13:34
Last Modified: 20 Sep 2018 10:34
URI: http://repozitorij.fsb.hr/id/eprint/7674

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