Prilog utvrđivanju mjerne nesigurnosti baždarnog postupka etalona hrapavosti

Gažan, Biserka (1997) Prilog utvrđivanju mjerne nesigurnosti baždarnog postupka etalona hrapavosti. = Contribution to establishing measurement uncertainty for the calibration of roughness reference standards. Scientific master's thesis , Sveučilište u Zagrebu, Fakultet strojarstva i brodogradnje, UNSPECIFIED. Mentor: UNSPECIFIED.

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Abstract (Croatian)

Baždarni etaloni hrapavosti (LFSB) služe za baždarenje elektroničko-mehaničkih uređaja s ticalom i etalona za podešavanje te moraju posjedovati najviša mjeriteljska svojstva. Etaloni su izrađeni postupkom silicijske planarne tehnologije. U postupku baždarenja to omogućuje primjenu inerferencijske i polarizacijske metode za utvrđivanje parametra dubine brazde d. Dubina brazde najznačajnija je ulazna veličina baždarnog postupka. U cilju ispitivanja razine mjerne nesigurnosti dubine brazde, a time i cijelog baždarnog postupka u radu je primijenjena interferencijska i polarizacijska metoda mjerenja dubine brazde. Interferencijska mjerenja dubine brazde d izvršena su na pozlaćenim dijelovima mjerne površine sa slijedom brazdi. Pri tome je korišten interferencijski mikroskop EPIVAL - I\NTERPHAKO uz primjenu filtra valne duljine X=584 nm. Polarizacijska metoda mjerenja izvršena je primjenom elipsometra AUTOEL® - III na prozirnom sloju SiO2. Kao izvor svjetla korišten je ` He\Ne laser valne duljine 632,8 nm. Mjerenja su izvršena na baždarnim etalonima i waferima. Analiza rezultata mjerenja dubine brazde d primijenjenih metoda provedena je prema teoriji usporedbenih mjerenja. Primjena teorije usporedbenih mjerenja u analizi rezultata mjerenja dubine brazde, omogućena je radovima D.Bencic i F.Dusman [18], [19], [20] koji polaze od postavke međunarodne norme ISO 5725 - 1986 (E). U analizu rezultata uključen je i pojam mjerne kompatibilnosti koji su uveli autori D.Bencic i F.Dusman. \Na osnovu provedene analize prednost je data interferencijskoj metodi te je prihvaćena i propisana baždarnim postupkom. Primjenom interferencijske metode utvrđena je razina mjerne nesigurnosti mjerenja dubine brazde d u mjernom području do 4 µm.

Abstract

Roughness reference standards (LFSB) are used for calibration of stylus instruments and calibration specimens so they have the highest metrological qualities. Roughness reference standards are made by silicon planar technology. In the procedure of calibration is therefore enabled the application of interferometric and polarisation method for defining the depth of groove. The most important input in calibration of roughness reference standards is the depth of groove d. In order to achieve the lower level of measurement uncertainty of depth of groove measurement, in paper is used interferometric and polarisation method. The interferometric measurement is performed on the gilt part of surface with grid of repetitive rectangular grooves. The interferometric method was obtained using microscope EPIVAL-INTERPHAKO and interference filter with wave length X 584 nm. The polarisation method for measuring the depth was applied on the transparent layer SiO2 using Elipsometer AUTOEL® - III with sours of light HeNe laser k= 632,8 nm. The measurements were made on roughness reference standards and on the wafers. Analyses of the measurement results, given by applied methods for depth of groove measurement, have been done according to theory of comparison measurement. Application of the theory of comparison measurement in a measurement results analysis has been made possible by means of references written by authors D.Bencid-F.Dusman [18] [19] [20]. This theory includes methods of mathematical statistics and is based upon international standard ISO 5725-1986 (E). The concept of measurement compatibility also introduced by authors D.Bencid-F.Dusman was included in the result's analysis. On the basis of the realised analysis, interferometric method has obtained preference, and this method was accepted and prescribed by calibration procedure. By using of interferometric method, the level of measurement uncertainty of the depth of groove measurement in the measuring range till 4 µm, has been established.

Item Type: Thesis (Scientific master's thesis)
Uncontrolled Keywords: etalon hrapavosti; baždarenje;
Keywords (Croatian): roughness reference standards; calibration;
Date Deposited: 22 Sep 2014 18:00
Last Modified: 16 Oct 2015 13:20
URI: http://repozitorij.fsb.hr/id/eprint/115

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